Turbovac and mag - Ideal Vacuum Products
Turbovac and mag - Ideal Vacuum Products
Turbovac and mag - Ideal Vacuum Products
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Technical Data<br />
TURBOVAC TW 250 S<br />
Inlet flange<br />
DN<br />
100 ISO-K / 100 CF<br />
Pumping speed at 10 -5 mbar (10 -5 Torr)<br />
N 2 I x s -1<br />
Ar I x s -1<br />
H 2 I x s -1<br />
He I x s -1<br />
Max. gas throughput<br />
N 2<br />
Ar<br />
H 2<br />
He<br />
Ultimate pressure with two-stage oil-sealed<br />
rotary vane pump<br />
mbar (Torr)<br />
Max. permissible backing pressure<br />
for N 2<br />
mbar (Torr)<br />
Operating speed min -1<br />
230<br />
210<br />
80<br />
150<br />
3.7 mbar x l x s -1 at 10 -1 mbar<br />
1.6 mbar x l x s -1 at 10 -2 mbar<br />
1.1 mbar x l x s -1 at 10 -1 mbar<br />
2.4 mbar x l x s -1 at 10 -1 mbar<br />
< 2 x 10 -8 (< 1.5 x 10 -2 )<br />
3 (2.3)<br />
51 600<br />
Run-up time, approx.<br />
Foreline flange<br />
Venting connection<br />
Weight<br />
without frequency converter<br />
with frequency converter<br />
Recommended forevacuum pump<br />
TRIVAC<br />
diaphragm pump<br />
with an ultimate pressure<br />
< 3 mbar (< 2.25 Torr)<br />
<strong>and</strong> a pumping speed<br />
at 3 mbar (2.25 Torr)<br />
TRIVAC (at purge gas operation)<br />
min<br />
kg (lbs)<br />
kg (lbs)<br />
3<br />
DN 16 KF<br />
Thread M 5<br />
5.0 (11.0)<br />
5.8 (12.80)<br />
D 2.5 E<br />
upon request<br />
D 8 B<br />
Technical Data TURBO.DRIVE TD 400<br />
Power supply<br />
V DC<br />
Ripple %<br />
24 ±10 %<br />
< 3<br />
Output<br />
Voltage, 3 phase<br />
Power<br />
Frequency<br />
Ambient temperature<br />
during operation<br />
during storage<br />
Weight, approx.<br />
Serial interface<br />
V DC<br />
W<br />
Hz<br />
°C (°F)<br />
°C (°F)<br />
kg (lbs)<br />
0 to 24<br />
160<br />
0 to 1500<br />
+5 to +45 (+41 to +113)<br />
-15 to +70 (-5 to +158)<br />
0.7 (1.55)<br />
RS 232 C, RS 485 C or Profibus<br />
Oerlikon Leybold <strong>Vacuum</strong> Full Line Catalog<br />
53<br />
C09
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