Turbovac and mag - Ideal Vacuum Products

Mechanical Rotor Suspension
with Frequency Converter for Attaching or Separate
with Compound Stage
TURBOVAC SL 80
Typical Applications
- Helium leak detectors
- Mass spectrometers (gas chromatography
GC-MS), liquid chromatography
(LC-MS), residual gas analysis,
mobile analytical systems, etc.)
- Electron beam microscopy
- XHV-/UHV systems
- Transfer chambers
h
h 2
b
b 1
21°
ISO-K
Ø d
20°
57°
17°
h 3
DN d h h 1
63 ISO-K mm 95 145 -
in. 3.74 5.71
63 CF mm 95 166 150
in. 3.74 5.71 5.91
h 2 h 3 b
63 ISO-K mm 22 17 114
in. 0.87 0.67 4.49
63 CF mm 27 22 114
in. 1.06 0.87 4.49
b 1 b 2 b 3 b 4
63 ISO-K mm 66 - - -
in. 2.60 - - -
63 CF mm 66 59 101 117
in. 2.60 2.32 3.98 4.61
Seal gas connection
CF
Ø d
h h 1
h 2 h 3
b 2
b 3
b
b 4
b 1
21°
17°
5°
57°
Technical Features
- Oil free pump
- High pressure foreline tolerance
- Excellent resistance to vibration due
to proven mechanical bearings
- Efficient convection cooling due to a
large number of cooling fins
- Purge gas/venting connection
- Installation in any orientation
- Flexible attachment of the frequency
converter to the pump
- Small footprint
- Delayed venting through the frequency
converter TURBO.DRIVE
TD 400 (optional)
- Selection of interfaces, RS 232 C,
RS 485 C, Profibus
Dimensional drawing for the TURBOVAC SL 80: Attachment examples
Pumping Speed
70
l/s
60
N 2
Ar
50
He
H 2
40
30
20
10
0
10 -6 10 -5
10 -4
10 -3
10 -2
10 -1
Inlet Pressure
mbar
1
Advantages to the User
- Easy to integrate into complex
vacuum systems
- Space-saving
- Prepared for pumping of slightly
corrosive gases owing to the seal
gas connection
- High reliability,
MTTF over 200,000 hours
- Matching accessories (fan, water
cooling, seal gas/venting valves,
power failure venting valves, flange
heaters, different cable lengths etc.)
- High reliability due to self-monitoring
Pumping speed as a function of the inlet pressure
C09 40
Oerlikon Leybold Vacuum Full Line Catalog