Turbovac and mag - Ideal Vacuum Products

Technical Data
TURBOVAC 151 (C)
Inlet flange
DN
100 ISO-K 100 CF
Pumping speed
N 2 I x s -1
Ar I x s -1
He I x s -1
H 2 I x s -1
Max. gas throughput
N 2 mbar x I x s -1
Ar mbar x I x s -1
H 2 mbar x I x s -1
Compression ratio
N 2
He
H 2
145 145
150 150
135 135
115 115
1.5 1.5
1.3 1.3
1.0 1.0
1 x 10 9 1 x 10 9
2 x 10 4 2 x 10 4
8 x 10 2 8 x 10 2
Ultimate pressure
Max. continuous inlet pressure 1)
Max. foreline pressure for N 2
mbar (Torr)
mbar (Torr)
mbar (Torr)
< 1 x 10 -10 (< 0.75 x 10 -10 ) < 1 x 10 -10 (< 0.75 x 10 -10 )
5 x 10 -2 (4 x 10 -2 ) 5 x 10 -2 (4 x 10 -2 )
5 x 10 -1 (4 x 10 -1 ) 5 x 10 -1 (4 x 10 -1 )
Recommended forevacuum pump
from TRIVAC D 4 B to D 16 B
from TRIVAC D 4 B to D 16 B
Run-up time
at 95% of nominal speed
Purge / vent port
Cooling water connection
(hose nozzles)
Weight, approx.
Max. power consumption /
Ultimate pressure
min
DN
mm (in.)
kg (lbs)
VA
VA
≈ 2 ≈ 2
10 KF 10 KF
10 (0.39) 10 (0.39)
8 (17) 8 (17)
680 680
480 480
1) Water-cooled
Technical Data
TURBO.DRIVE TD 20 classic
Mains connection, 50 - 60 Hz; selectable
Max. output voltage
Overload current limit
V
V
A
100 to 240 (-15 % / +10 %)
3 x 47
5
Permissible ambient temperature
Protection class
Dimensions (W x H x D)
Weight, approx.
°C (°F)
IP
mm
(in.)
kg (lbs)
0 to +45 (+32 to +113)
20
213 x 128 x 315 (1/2 19", 3 HU)
8.39 x 5.04 x 12.40 (1/2 19", 3 HU)
4 (8.8)
Oerlikon Leybold Vacuum Full Line Catalog
17
C09