Turbovac and mag - Ideal Vacuum Products

Technical Data
Inlet flange
DN
TURBOVAC MAG
W 830 W 830 C W 1300 W 1300 C
160 CF 160 ISO-F 200 CF 200 ISO-F 250 ISO-F
Pumping speed according to PNEUROP
N 2 I x s -1
Ar I x s -1
He I x s -1
H 2 I x s -1
Operating speed min -1
Compression ratio
N 2
Ultimate pressure according to DIN 28 400
mbar
(Torr)
900 700 1170 1100 1220
750 650 1100 1050 1180
900 500 1150 1100 1200
740 350 920 920 1020
36 000 24 000 36 000 36 000 36 000
1.5 x 10 8 > 5 x 10 7 1.5 x 10 8 > 10 8 > 10 8
< 1 x 10 -10 < 10 -8 < 1 x 10 -10 < 10 -8 < 10 -8
(< 0.75 x 10 -10 ) (< 0.75 x 10 -8 ) (< 0.75 x 10 -10 ) (< 0.75 x 10 -8 ) (< 0.75 x 10 -8 )
Max. foreline pressure for N 2
with convection cooling
with water cooling
mbar (Torr)
mbar (Torr)
0.2 (0.15) – 0.2 (0.15) – –
2.0 (1.5) 2.0 (1.5) 2.0 (1.5) 2.0 (1.5) 2.0 (1.5)
Recommended backing pump
Rotary vane pump
or dry compressing pump
offering a pumping speed of 100 m 3 /h
Run-up time
Foreline flange
Purge and vent port
min
DN
DN
TRIVAC TRIVAC TRIVAC TRIVAC TRIVAC
D 65 BCS D 65 BCS D 65 BCS D 65 BCS D 65 BCS
< 6 < 4 < 6 < 6 < 6
40 KF 40 KF 40 KF 40 KF 40 KF
10 KF / 16 KF 10 KF / 16 KF 10 KF / 16 KF 10 KF / 16 KF 10 KF / 16 KF
Cooling water connection
(OD of tube)
Weight, approx.
mm (in.)
kg (lbs)
1/4" 1/4" 1/4" 6 6
35 (77.3) 32 (70.6) 35 (77.3) 32 (70.6) 32 (70.6)
Technical Data
MAG.DRIVE digital
Mains connection, 50/60 Hz
Current for connected consumers
max.
Max. motor voltage
Nominal frequency
Permissible ambient temperature
Dimensions (W x H x D)
Weight, approx.
V
A
V
Hz
°C (°F)
mm (in.)
kg (lbs)
200 - 240, +10 %/-15 %
20
60
50/60
0 to +45 (+32 to +113)
483 x 213 x 1/2 19" (19.02 x 8.39 x 1/2 19")
10 (22)
Oerlikon Leybold Vacuum Full Line Catalog
95
C09