Online Semi-radius Probe Tip Cleaning and Reshaping
Online Semi-radius Probe Tip Cleaning and Reshaping
Online Semi-radius Probe Tip Cleaning and Reshaping
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Contact resistance – silicon carbid<br />
SIC abrasive<br />
50um OD 25C clean freq 100 die<br />
Cres(ohms)<br />
5<br />
4.5<br />
4<br />
3.5<br />
3<br />
2.5<br />
2<br />
1.5<br />
1<br />
0.5<br />
0<br />
Wafer average 0.10 ohms<br />
Min<br />
Max<br />
Average<br />
<strong>Cleaning</strong> cycle<br />
1<br />
501<br />
1001<br />
1501<br />
2001<br />
2501<br />
3001<br />
3501<br />
4001<br />
4501<br />
5001<br />
5501<br />
6001<br />
6501<br />
7001<br />
7501<br />
Test #<br />
June 3, 2007<br />
IEEE SW Test Workshop 14
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