Online Semi-radius Probe Tip Cleaning and Reshaping
Online Semi-radius Probe Tip Cleaning and Reshaping
Online Semi-radius Probe Tip Cleaning and Reshaping
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
Contact resistance – dual clean<br />
JEM elsatomeric & SIC abrasive<br />
50um OD 25C clean freq 100 die<br />
Each "test" represents 25 contacts (190K data points)<br />
5<br />
4.5<br />
4<br />
Wafer average 0.40 ohms opens<br />
removed from average data<br />
Cres(ohms)<br />
3.5<br />
3<br />
2.5<br />
2<br />
1.5<br />
1<br />
Min<br />
Max<br />
Average<br />
0.5<br />
0<br />
1<br />
501<br />
1001<br />
1501<br />
2001<br />
2501<br />
3001<br />
3501<br />
4001<br />
Test #<br />
4501<br />
5001<br />
5501<br />
6001<br />
6501<br />
7001<br />
7501<br />
S. McKnight<br />
05/02/2007<br />
<strong>Cleaning</strong> cycle<br />
June 3, 2007<br />
IEEE SW Test Workshop 15
Change language