Online Semi-radius Probe Tip Cleaning and Reshaping

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Traditional way to maintain semi-radius probe tips Use elastomeric abrasive i.e. polymer based material – continues to radius tips Remove periodically to reshape (put a flat back on it) June 3, 2007 IEEE SW Test Workshop 8
The solution Two part cleaning – insitu ‣ Abrasive material for flat tip – SiC ‣ Elastomeric material for radius tip and removes stringers (contact pad and cleaning detritus) June 3, 2007 IEEE SW Test Workshop 9
Page 1 and 2: Online Semi-radius Probe Tip Cleani
Page 3 and 4: Acknowledgements Jack Courtney John
Page 5 and 6: Why Semi-radius? Lower pad damage i
Page 7: The problem with Semi- radiused pro
Page 11 and 12: June 3, 2007 Typical recipes 5 -10
Page 13 and 14: Contact resistance - Elastomeric 5
Page 15 and 16: Contact resistance - dual clean JEM
Page 17 and 18: Measurement circuit • Test stimul
Page 19 and 20: SiC clean Typical flat tip Silicon
Page 21 and 22: Sequence and motion (use animation)
Page 23 and 24: Detractor Die Size limited - effect
Page 25: 142 mm 155 mm Future work Evaluate

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