Online Semi-radius Probe Tip Cleaning and Reshaping

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142 mm 155 mm <strong>Cleaning</strong> summary Flat material Radius material <strong>Semi</strong>-Radius tip + = June 3, 2007 IEEE SW Test Workshop 24
142 mm 155 mm Future work Evaluate even lower cost materials Look for extension to other probe technologies i.e. Cobra, metrology usage Maximize cleaning medium lifetime Larger cleaning plate Thank you! Questions? June 3, 2007 IEEE SW Test Workshop 25
Page 1 and 2: Online Semi-radius Probe Tip Cleani
Page 3 and 4: Acknowledgements Jack Courtney John
Page 5 and 6: Why Semi-radius? Lower pad damage i
Page 7 and 8: The problem with Semi- radiused pro
Page 9 and 10: The solution Two part cleaning - in
Page 11 and 12: June 3, 2007 Typical recipes 5 -10
Page 13 and 14: Contact resistance - Elastomeric 5
Page 15 and 16: Contact resistance - dual clean JEM
Page 17 and 18: Measurement circuit • Test stimul
Page 19 and 20: SiC clean Typical flat tip Silicon
Page 21 and 22: Sequence and motion (use animation)
Page 23: Detractor Die Size limited - effect

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