Online Semi-radius Probe Tip Cleaning and Reshaping

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Detractor<br />

Die Size limited – effectively cut cleaning<br />

area in half<br />

June 3, 2007<br />

IEEE SW Test Workshop 23

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Benefits Low cost solution – use existing materials Comparable CRES to SiC material Non Silicone Uniform tip shape throughout life of probe Longer probe life June 3, 2007 IEEE SW Test Workshop 22

Detractor Die Size limited – effectively cut cleaning area in half June 3, 2007 IEEE SW Test Workshop 23

Page 1 and 2: Online Semi-radius Probe Tip Cleani
Page 3 and 4: Acknowledgements Jack Courtney John
Page 5 and 6: Why Semi-radius? Lower pad damage i
Page 7 and 8: The problem with Semi- radiused pro
Page 9 and 10: The solution Two part cleaning - in
Page 11 and 12: June 3, 2007 Typical recipes 5 -10
Page 13 and 14: Contact resistance - Elastomeric 5
Page 15 and 16: Contact resistance - dual clean JEM
Page 17 and 18: Measurement circuit • Test stimul
Page 19 and 20: SiC clean Typical flat tip Silicon
Page 21: Sequence and motion (use animation)
Page 25: 142 mm 155 mm Future work Evaluate

Online Semi-radius Probe Tip Cleaning and Reshaping

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