Debris and Edge Excursions - Semiconductor Wafer Test Workshop
Debris and Edge Excursions - Semiconductor Wafer Test Workshop
Debris and Edge Excursions - Semiconductor Wafer Test Workshop
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Probe Mark Area Inspection With Area Filter<br />
9.3% 8.9% 16.2% 12.2% 10.5%<br />
9.5%<br />
9.6%<br />
8.3%<br />
9.8%<br />
10.3%<br />
9.5%<br />
12%<br />
12%<br />
13.3%<br />
12.5%<br />
13.2%<br />
8.4%<br />
12.8%<br />
9.9%<br />
12%<br />
10.1%<br />
9.1%<br />
11.0%<br />
Max. area = 15%<br />
Pad areas greater than max. area fail
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