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Debris and Edge Excursions - Semiconductor Wafer Test Workshop

Debris and Edge Excursions - Semiconductor Wafer Test Workshop

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Method 1 – No <strong>Debris</strong> Filters<br />

Inspection<br />

Results:<br />

10x<br />

Inspection<br />

Time:<br />

Total number<br />

of defects:<br />

10 minutes<br />

30 seconds<br />

7100<br />

Approximate<br />

Review Time:<br />

1 hours 10<br />

minutes

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