Debris and Edge Excursions - Semiconductor Wafer Test Workshop
Debris and Edge Excursions - Semiconductor Wafer Test Workshop
Debris and Edge Excursions - Semiconductor Wafer Test Workshop
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The Challenge of Automated Probe Mark Inspection<br />
To make inspection affordable<br />
>15wph or higher throughput needed<br />
Better than 1µm resolution needed for distinguishing<br />
true from false defects
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