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Qualcomm's Assessment of 3D Interconnect Equipment ... - Sematech

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Power & Ground in a TSS stack<br />

How many TSV and T2T connections are required to distribute<br />

power and ground<br />

PDN TSV Requirements<br />

TSV I*R pitch<br />

TSV farm pitch<br />

200 µm<br />

Intra-Tier I*R pitch<br />

TSV farm density<br />

50/mm 2<br />

TSV farm density<br />

Low Tier Count High<br />

Thomas R Toms July 16, 2008<br />

PAGE 11

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