FINFET Isolation Approaches and Ramifications - SOI Industry ...
FINFET Isolation Approaches and Ramifications - SOI Industry ...
FINFET Isolation Approaches and Ramifications - SOI Industry ...
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IBM Semiconductor Research <strong>and</strong> Development Center<br />
Bulk Isolated FinFet Process (2)<br />
Dep/etch Oxide<br />
Planarize Oxide<br />
fin<br />
fin<br />
CSD<br />
CSD<br />
Oxide<br />
Oxide<br />
Silicon Substrate<br />
Silicon Substrate<br />
Recess Oxide<br />
Recess Depth<br />
fin<br />
CSD<br />
Oxide<br />
Silicon Substrate<br />
FD<strong>SOI</strong> Workshop Hsinchu, Taiwan April 22, 2013