FINFET Isolation Approaches and Ramifications - SOI Industry ...
FINFET Isolation Approaches and Ramifications - SOI Industry ...
FINFET Isolation Approaches and Ramifications - SOI Industry ...
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IBM Semiconductor Research <strong>and</strong> Development Center<br />
Drain-source Current Suppression<br />
• Heavy doping:<br />
– BTB current<br />
– Nonuniformity<br />
• Deep gate<br />
– Capacitance<br />
– Process challenge<br />
• Shallow junction<br />
– Strain reduction<br />
– Process challenge<br />
FD<strong>SOI</strong> Workshop Hsinchu, Taiwan April 22, 2013