Millenium Science Complex - Center for Nanoscale Systems
Millenium Science Complex - Center for Nanoscale Systems
Millenium Science Complex - Center for Nanoscale Systems
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This version of CasaXPS is owned by Penn State University<br />
This version of CasaXPS is owned by Penn State University<br />
F contamination depends on process temperature<br />
#1. 300 °C<br />
#2. 80 °C<br />
#1. 50 nm Al 2 O 3 @ 300°C<br />
#2. 50 nm Al 2 O 3 @ 80°C<br />
Kalrez 4079 1 month old