Millenium Science Complex - Center for Nanoscale Systems
Millenium Science Complex - Center for Nanoscale Systems
Millenium Science Complex - Center for Nanoscale Systems
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Cross contamination: ZnO<br />
Facts:<br />
User complained about degraded<br />
optical and electrical properties after<br />
ZnO deposition<br />
Solutions:<br />
Capping chamber by Al 2 O 3<br />
Complete chamber cleaning<br />
Replacing manifold<br />
Stopped doing ZnO<br />
SIMS analysis of Al 2 O 3
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