Millenium Science Complex - Center for Nanoscale Systems
Millenium Science Complex - Center for Nanoscale Systems
Millenium Science Complex - Center for Nanoscale Systems
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Major issues<br />
• Electrical leakage<br />
1. Cross contamination: ZnO<br />
2. Chamber leak -- O-ring etches Al lid(F outgassing)<br />
• Software crashes frequently due to RF noise<br />
• Self contamination<br />
1. ALD valve<br />
2. Stop valve<br />
3. Gauge- pulse dips
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