Millenium Science Complex - Center for Nanoscale Systems

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Savannah_200 • Al 2 O 3 (1.1Å GPC @200°C) • HfO 2 (1Å GPC @110 °C) • Ta 2 O 5 • TiO 2 (0.457ÅGPC @150 o C) Titanium isopropoxide Ti(OiPr)4 Tetrakis(dimethylamino)titanium (TDMAT) • ZrO 2 • ZnO 2 (stopped due to cross contamination) Usage:08-present • ~2,000 hrs per year ~23% based on 24/7 • $50 per use for academic $100 for industry before 3/1/12 $75 per use for academic $150 for industry after 3/1/12 • $1 per 1nm • $20,000 per year
High conformity of ALD coating Cross-sectional FESEM view of 20 nm HfO 2
Page 1: Millenium Science Complex New clean
Page 5 and 6: Cross-sectional TEM characterizatio
Page 7 and 8: Electrical test of Al 2 O 3 using M
Page 9 and 10: This version of CasaXPS is owned by
Page 15 and 16: Conclusions: • F contamination ca
Page 17 and 18: Vacuum maintenance Leak checking re
Page 19 and 20: Cross contamination: ZnO Facts: Use
Page 21 and 22: Major modifications 1. Expanded to

Millenium Science Complex - Center for Nanoscale Systems

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