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Sierra Series 830/840/860 Side-Trak™ and ... - Sierra Instruments

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<strong>Series</strong> <strong>830</strong>/<strong>840</strong>/<strong>860</strong> Instruction ManualAppendix AActual GasChemicalSymbolK-factorRelative N2Cp(Cal/g)Density(g/l) @ 0°CElastomerO-ring* Valve SeatMethyl Mercaptan CH 3SH .52 .2459 2.146 KRMethyl Trichlorosilane (CH 3) SiCl 3 .25 .164 6.669 KRMolybdenum Hexafluoride MoF 6 .21 .1373 9.366 KRMonoethylamine C 2H 5NH 2 .35 .387 2.011 KRMonomethylamine CH 3NH 2 .51 .4343 1.386 KRNeon NE 1.46 .245 .900Nitric Oxide NO .990 .2328 1.339Nitrogen N 2 1.000 .2485 1.25Nitrogen Dioxide NO 2 .74 .1933 2.052KR KRNitrogen Trifluoride NF 3 .48 .1797 3.168 KRNitrosyl Chloride NOCl .61 .1632 2.920 KRNitrous Oxide N 2O .71 .2088 1.964OctafluorocyclobutaneC 4F 6 .17 .185 8.397 KR(Freon-C318)Oxygen Difluoride OF 2 .63 .1917 2.406Oxygen O 2 1.000 .2193 1.427Ozone O 3 .446 .3 2.144Pentaborane B 5H 9 .26 .38 2.816 KRPentane C 5HI 2 .21 .398 3.219 KRPerchloryl Fluoride CIO 3F .39 .1514 4.571 KRPerfluoropropane C 3F 8 .174 .197 8.388 KRPhosgene COCl 2 .44 .1394 4.418 KRPhosphine PH 3 .76 .2374 1.517 KRPhosphorous Oxychloride POCl 3 .36 .1324 6.843 KRPhosphorous Pentafluoride PH 5 .30 .1610 5.620 KRPhosphorous Trichloride PCl 5 .30 .1250 6.127 KRPropane C 3H 8 .36 .3885 1.967 KRPropylene C 3H 6 .41 .3541 1.877Silane SiH 4 .60 .3189 1.433 KRSilicon Tetrachloride SiCl 4 .28 .1270 7.580 KRSilicon Tetrafluoride SiF 4 .35 .1691 4.643 KRSulfur Dioxide So 2 .69 .1488 2.858 KRSulfur Hexafluoride SF 6 .26 .1592 6.516Sulfuryl Fluoride SO 2F 2 .39 .1543 4.562 KRTeos .090 KR KRTetrafluorahydrazine N 2F 4 .32 .182 4.64 KRTrichlorofluormethaneCCl 3F .33 .1357 6.129 KR(Freon-11)Trichlorisilane SiHCl 3 .33 .1380 6.043 KR1,1,2-Trichloro-1,2,2 CCl 2FCClF 2 .20 .161 8.360 KRTrifluorethane (Freon-113)Trisobutyl Aluminum (C 4H 9)Al .061 .508 8.848 KRTitanium Tetrachloride TiCl 4 .27 .120 8.465 KRTrichloro Ethylene C 2HCl 3 .32 .163 5.95 KRTrimethylamine (CH 3) 3N .28 .3710 2.639 KRTungsten Hexasfuoride WF 6 .25 .0810 13.28 KR TeflonUranium Hexafluoride UF 6 .20 .0888 15.70 KRVinyl Bromide CH 2CHBr .46 .1241 4.772 KRVinyl Chloride CH 2CHCl .48 .12054 2.788 KRXenon Xe 1.44 .0378 5.858IM-83/84/86-H A-9

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