Trends in Lithography - JePPIX
Trends in Lithography - JePPIX
Trends in Lithography - JePPIX
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ASML <strong>Lithography</strong> Product Families<br />
Platform:<br />
System Type:<br />
Introduction:<br />
Wafer Size:<br />
Application:<br />
PAS 2500/5000<br />
Stepper<br />
1985<br />
≤ 150mm<br />
1.0 - 0.45µm<br />
Innovations: TTL DRR<br />
Phase Grat<strong>in</strong>g Align<br />
Air Bear<strong>in</strong>g<br />
L<strong>in</strong>ear Motor Stages<br />
Public<br />
PAS 5500<br />
Stepper / Scanner<br />
1990 / 1997<br />
100- 200mm<br />
0.50µm - 90 nm<br />
5-axis Stage Interferometry<br />
On-the-fly Focus & Level<strong>in</strong>g<br />
Magnetically Coupled<br />
Motor Scann<strong>in</strong>g stages<br />
TWINSCAN<br />
Scanner<br />
2000<br />
200 & 300mm<br />
0.15 -
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