Trends in Lithography - JePPIX
Trends in Lithography - JePPIX
Trends in Lithography - JePPIX
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Net system sales breakdown <strong>in</strong> value: 2010<br />
Korea<br />
32%<br />
Region<br />
USA<br />
13%<br />
Taiwan<br />
32%<br />
Technology<br />
ArF KrF<br />
immersion 17%<br />
ArF 83%<br />
Immersion<br />
77%<br />
Europe 4%<br />
Japan 9%<br />
S<strong>in</strong>gapore 5%<br />
Ch<strong>in</strong>a 5%<br />
Public<br />
ArF dry 5%<br />
I-L<strong>in</strong>e 1%<br />
Numbers have been rounded for readers’ convenience.<br />
94<br />
ArF<br />
immersion<br />
End-use<br />
NAND<br />
19%<br />
DRAM<br />
47%<br />
Sales <strong>in</strong> Units<br />
12<br />
68<br />
Foundry 24%<br />
23<br />
ArF dry KrF I-L<strong>in</strong>e<br />
IDM 10%
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