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2 - åç«è¯å大å¸
2 - åç«è¯å大å¸
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PECVD 沉 積 碳 化 矽 密 封 層STI鎢鎢PSGn + n + USG p + p + USGP 型 井 區深 埋 SiO 2 層P 型 晶 圓N 型 井 區