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2 - åç«è¯å大å¸
2 - åç«è¯å大å¸
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PVD 沉 積 鉭 和 氮 化 鉭 阻 擋 層SODSODSOD銅 1 銅 1 SOD 銅 1 銅 1STI鎢鎢PSGn + n + USG p + p + USGP 型 井 區深 埋 SiO 2 層P 型 晶 圓N 型 井 區