Production of Polysilicon using a Modified Siemens Process
Production of Polysilicon using a Modified Siemens Process
Production of Polysilicon using a Modified Siemens Process
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Description: TET is reacted with H2O to form SiO2<br />
Primary Object: Hydrolysis Reactor<br />
Primary Actors: TET, H2O<br />
Pre-condition: TET from other parts in the process is mixed with water and fed in at the<br />
proper conditions<br />
Flow <strong>of</strong> Events:<br />
1. TET and H2O are mixed and enter the reactor<br />
2. TET reacts with H2O to form SiO2 and HCl<br />
3. Products exit the reactor<br />
Post-condition: SiO2 is formed and most <strong>of</strong> the TET formed from the earlier stages in<br />
the process is consumed<br />
Scenario (1.5.1): Separation <strong>of</strong> SiO2<br />
<br />
Description: Solid SiO2 products are separated from the other compounds<br />
Primary Object: Cyclone<br />
Primary Actors: SiO2, HCl<br />
Pre-condition: Inputs are fed in at proper conditions and cyclone is<br />
maintained at proper conditions. SiO2 is a solid.<br />
Flow <strong>of</strong> Events:<br />
1. SiO2, HCl product and small amounts <strong>of</strong> TCS, TET, and water are fed<br />
into the cyclone<br />
2. Solid SiO2 falls to the bottom and exits the cyclone<br />
3. Gaseous compounds exit through the top <strong>of</strong> the cyclone<br />
Post-condition: All SiO2 is separated from the hydrolysis reactor product stream.