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Production of Polysilicon using a Modified Siemens Process

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Scenario (3.1): Reactor Maintenance<br />

Description: Reactors will be inspected for performance<br />

Primary Object: Reactors<br />

Primary Actors: Maintenance Operator<br />

Pre-condition: <strong>Process</strong> is not running<br />

Flow <strong>of</strong> Events:<br />

1. Operator inspects the reactor for any signs <strong>of</strong> problems<br />

2. If there is a problem, the operator will take appropriate action, whether it is<br />

replacing or fixing the reactor/problem<br />

3. The operator documents the actions taken and the date the inspection took<br />

place<br />

Post-condition: Reactor is ready for optimal performance.<br />

Scenario (3.1.1): Weakened Structural Integrity<br />

<br />

Description: Structural weakening in reactors must be detected and replaced<br />

Primary Object: Reactor<br />

Primary Actors: Maintenance Operator<br />

Pre-condition: <strong>Process</strong> not running<br />

Flow <strong>of</strong> Events:<br />

1. Maintenance operator inspects reactor<br />

2. Operator discovers structural weakness, such as corrosion from HCl<br />

3. Reactor is removed and replaced with new reactor<br />

4. Maintenance is documented<br />

Post-condition: New reactor installed and process is able to continue without<br />

increased operation hazard levels<br />

Scenario (3.1.2): Leak in Reactor<br />

Description: Reactor develops a leak and must be patched up or replaced<br />

Primary Object: Reactor<br />

Primary Actors: Maintenance Operator

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