Production of Polysilicon using a Modified Siemens Process
Production of Polysilicon using a Modified Siemens Process
Production of Polysilicon using a Modified Siemens Process
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CHEMCAD 6.0.1 Page 14<br />
Job Name: Systems Final Project Impurities Date: 05/12/2011 Time: 02:29:15<br />
STREAM PROPERTIES<br />
Stream No. 21 22 23 24<br />
Name<br />
- - Overall - -<br />
Molar flow kmol/h 30.6257 15.5830 3.3691 6.1696<br />
Mass flow kg/h 167.4450 1744.9207 475.3427 1048.2182<br />
Temp K 1373.0000 1373.0000 306.8699 329.7928<br />
Pres bar 1.0000 1.0000 1.0000 1.0000<br />
Vapor mole fraction 1.000 1.000 0.0000 0.0000<br />
Enth kW 327.46 -1437.9 -513.23 -1179.1<br />
Tc K 33.2700 474.9816 484.6973 507.0000<br />
Pc bar 12.9595 92.8192 41.3092 35.9001<br />
Std. sp gr. wtr = 1 0.206 1.335 1.381 1.493<br />
Std. sp gr. air = 1 0.189 3.866 4.871 5.866<br />
Degree API 556.4040 -25.5211 -29.0032 -36.7433<br />
Average mol wt 5.4675 111.9758 141.0886 169.8996<br />
Actual dens kg/m3 0.0552 0.9806 1333.7551 1403.6521<br />
Actual vol m3/h 3033.3404 1779.4601 0.3564 0.7468<br />
Std liq m3/h 0.8140 1.3069 0.3443 0.7019<br />
Std vap 0 C m3/h 686.4335 349.2722 75.5140 138.2840<br />
- - Vapor only - -<br />
Molar flow kmol/h 26.5707 15.5830<br />
Mass flow kg/h 53.5614 1744.9207<br />
Average mol wt 2.0158 111.9758<br />
Actual dens kg/m3 0.0177 0.9806<br />
Actual vol m3/h 3033.2909 1779.4601<br />
Std liq m3/h 0.7652 1.3069<br />
Std vap 0 C m3/h 595.5469 349.2722<br />
Cp kJ/kg-K 15.7528 0.6952<br />
Z factor 1.0002 1.0005<br />
Visc N-s/m2 2.571e-005 4.613e-005<br />
Th cond W/m-K 0.5482 0.0093<br />
- - Liquid only - -<br />
Molar flow kmol/h 3.3691 6.1696<br />
Mass flow kg/h 475.3427 1048.2182<br />
Average mol wt 141.0886 169.8996<br />
Actual dens kg/m3 1333.7551 1403.6521<br />
Actual vol m3/h 0.3564 0.7468<br />
Std liq m3/h 0.3443 0.7019<br />
Std vap 0 C m3/h 75.5140 138.2840<br />
Cp kJ/kg-K 0.9255 0.8332<br />
Z factor 0.0043 0.0048<br />
Visc N-s/m2 0.0003193 0.0003495<br />
Th cond W/m-K 0.1175 0.0954<br />
Surf tens N/m 0.0166 0.0156
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