Production of Polysilicon using a Modified Siemens Process
Production of Polysilicon using a Modified Siemens Process
Production of Polysilicon using a Modified Siemens Process
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Use Case 3<br />
Textual Scenarios<br />
Use Case 1: Reaction from Input to form Product<br />
The first use case addresses the primary function <strong>of</strong> the system, which is to produce<br />
polysilicon product from an input <strong>of</strong> metallurgical grade silicon (MG-Si) and hydrogen chloride<br />
(HCl). This use case also addresses the goal <strong>of</strong> dealing with the toxic tetrachlorosilane by<br />
forming it into another product, namely silicon dioxide (SiO)2. Although the specific conditions
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