Production of Polysilicon using a Modified Siemens Process

Use Case Scenario Req.
#
1.2.4 1.2.5 Most TET is separated from TCS
1.3 1.3.1 TCS reacts with H2 to form Poly-Si
1.3 1.3.2 Poly-si is deposited onto seed rods
1.3 1.3.3 Poly-si is >99.9999% purity
1.3 1.3.4 Other compounds exit CVD safetly
1.4 1.4.1
1.4.1 1.4.2
Products from CVD are separated into
desirables and undesirables
Most TET is removed from CVD
product stream
1.4.2 1.4.3 Most HCl is removed from stream
1.5 1.5.1
TET must react with H2O to form
SiO2
1.5 1.5.2 SiO2 must be >97% purity
1.5 1.5.3
1.5.1 1.5.4
1.5.1 1.5.5
Description
Most TET from process must be
consumed
SiO2 must exit through bottom of
cyclone
Other compounds exit through top of
cyclone