Production of Polysilicon using a Modified Siemens Process
Production of Polysilicon using a Modified Siemens Process
Production of Polysilicon using a Modified Siemens Process
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CHEMCAD 6.0.1 Page 5<br />
Job Name: Systems Final Project Impurities Date: 05/12/2011 Time: 02:29:15<br />
EQUIPMENT SUMMARIES<br />
<br />
Reactor Summary<br />
Equip. No. 1 8<br />
Name<br />
Thermal mode 2 2<br />
Temperature K 623.0000 573.0000<br />
Heat duty kW -802.9692 1391.8734<br />
Key Component 6 4<br />
Frac. Conversion 1.0000 0.9990<br />
Reactor Pressure bar 1.0000<br />
Calc H <strong>of</strong> Reac. -230448.5938 471754.5000<br />
(kJ/kmol)<br />
Stoichiometrics:<br />
Hydrogen 1.150 0.000E+000<br />
Trichlorosilane 0.850 0.000E+000<br />
Silicon TetraCl 0.150 -1.000<br />
Hydrogen Chlori -3.150 4.000<br />
Silicon -1.000 0.000E+000<br />
Water 0.000E+000 -2.000<br />
Silicon Dioxide 0.000E+000 1.000<br />
Component Separator Summary<br />
Equip. No. 2 5<br />
Name<br />
Top Temp Spec 623.0000 1373.0000<br />
Bottom Temp Spec 623.0000 1373.0000<br />
Heat duty kW 0.0001 -69.1435<br />
Component No. 1 1.0000 1.0000<br />
Component No. 6 1.0000 1.0000<br />
Component No. 9 1.0000<br />
Component No. 10 1.0000<br />
Scds Rigorous Distillation Summary<br />
Equip. No. 3 6 16 17<br />
Name<br />
No. <strong>of</strong> stages 20 20 20 10<br />
1st feed stage 4 10 11 5<br />
Condenser mode 7 1 7 1<br />
Condenser spec 0.9900 20.0000 0.9950 5.0000<br />
Cond comp i pos. 3 3 9 0<br />
Reboiler mode 7 7 7 7<br />
Reboiler spec. 0.9900 0.9000 0.9950 0.9000<br />
Reboiler comp i 4 4 3 2<br />
Est. dist. rate 10.6667 2.9630<br />
(kmol/h)
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