Production of Polysilicon using a Modified Siemens Process
Production of Polysilicon using a Modified Siemens Process
Production of Polysilicon using a Modified Siemens Process
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CHEMCAD 6.0.1 Page 11<br />
Job Name: Systems Final Project Impurities Date: 05/12/2011 Time: 02:29:15<br />
STREAM PROPERTIES<br />
Stream No. 9 10 11 12<br />
Name<br />
- - Overall - -<br />
Molar flow kmol/h 10.0000 39.7131 15.8500 23.8807<br />
Mass flow kg/h 20.1580 1646.2687 285.5377 1646.2845<br />
Temp K 305.0000 573.0000 298.0000 313.2391<br />
Pres bar 1.0000 1.1000 1.0000 1.1000<br />
Vapor mole fraction 1.000 1.000 0.0000 0.0000<br />
Enth kW -1.2754 -1395.9 -1257.9 -2787.7<br />
Tc K 33.2700 326.6678 647.3500 545.8163<br />
Pc bar 12.9595 85.1165 221.1823 53.6634<br />
Std. sp gr. wtr = 1 0.070 1.060 1.000 1.374<br />
Std. sp gr. air = 1 0.070 1.431 0.622 2.380<br />
Degree API 1889.9286 2.0210 10.0000 -28.5509<br />
Average mol wt 2.0158 41.4540 18.0150 68.9378<br />
Actual dens kg/m3 0.0795 1.1960 996.7463 1333.3728<br />
Actual vol m3/h 253.6836 1376.5118 0.2865 1.2347<br />
Std liq m3/h 0.2880 1.5534 0.2855 1.1978<br />
Std vap 0 C m3/h 224.1365 890.1160 355.2563 535.2539<br />
- - Vapor only - -<br />
Molar flow kmol/h 10.0000 31.7969<br />
Mass flow kg/h 20.1580 1170.6313<br />
Average mol wt 2.0158 36.8159<br />
Actual dens kg/m3 0.0795 0.8505<br />
Actual vol m3/h 253.6836 1376.3304<br />
Std liq m3/h 0.2880 1.3739<br />
Std vap 0 C m3/h 224.1365 712.6849<br />
Cp kJ/kg-K 14.2970 0.8069<br />
Z factor 1.0005 0.9996<br />
Visc N-s/m2 9.005e-006 2.721e-005<br />
Th cond W/m-K 0.1749 0.0269<br />
- - Liquid only - -<br />
Molar flow kmol/h 15.8500 23.8807<br />
Mass flow kg/h 285.5377 1646.2845<br />
Average mol wt 18.0150 68.9378<br />
Actual dens kg/m3 996.7463 1333.3727<br />
Actual vol m3/h 0.2865 1.2347<br />
Std liq m3/h 0.2855 1.1978<br />
Std vap 0 C m3/h 355.2563 535.2539<br />
Cp kJ/kg-K 4.1851 1.4097<br />
Z factor 0.0010 0.0025<br />
Visc N-s/m2 0.0009258 0.0005661<br />
Th cond W/m-K 0.6060 0.1520<br />
Surf tens N/m 0.0721 0.0250
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