Production of Polysilicon using a Modified Siemens Process
Production of Polysilicon using a Modified Siemens Process
Production of Polysilicon using a Modified Siemens Process
Create successful ePaper yourself
Turn your PDF publications into a flip-book with our unique Google optimized e-Paper software.
Post-condition: The appropriate action is taken based on the operating pressure. If<br />
there is a dangerous condition, the alarm goes <strong>of</strong>f, if not, then process goes on<br />
as normal.<br />
Scenario (2.3): Flow rate<br />
Description: Flow rate sensors detect the difference between the desired operating<br />
pressure and the actual operating pressure and alerts if there is a certain<br />
difference between the two.<br />
Primary Object: Flow rate sensor<br />
Primary Actors: Streams <strong>of</strong> reactants and products throughout the system<br />
Pre-condition: Desired operating flow rate and maximum allowable difference are<br />
specified<br />
Flow <strong>of</strong> Events:<br />
1. Flow rate sensor takes reading <strong>of</strong> the operating temperature<br />
2. Sensor compares operating temperature to desired pressure<br />
3. Sensor compares the difference in the actual and desired pressure to the<br />
specified allowable difference<br />
4. If the difference is smaller, then alarm does nothing. If it is larger, the alarm<br />
goes <strong>of</strong>f.<br />
Post-condition: The appropriate action is taken based on the operating pressure. If<br />
there is a dangerous condition, the alarm goes <strong>of</strong>f, if not, then process goes on<br />
as normal.