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Production of Polysilicon using a Modified Siemens Process

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Post-condition: The appropriate action is taken based on the operating pressure. If<br />

there is a dangerous condition, the alarm goes <strong>of</strong>f, if not, then process goes on<br />

as normal.<br />

Scenario (2.3): Flow rate<br />

Description: Flow rate sensors detect the difference between the desired operating<br />

pressure and the actual operating pressure and alerts if there is a certain<br />

difference between the two.<br />

Primary Object: Flow rate sensor<br />

Primary Actors: Streams <strong>of</strong> reactants and products throughout the system<br />

Pre-condition: Desired operating flow rate and maximum allowable difference are<br />

specified<br />

Flow <strong>of</strong> Events:<br />

1. Flow rate sensor takes reading <strong>of</strong> the operating temperature<br />

2. Sensor compares operating temperature to desired pressure<br />

3. Sensor compares the difference in the actual and desired pressure to the<br />

specified allowable difference<br />

4. If the difference is smaller, then alarm does nothing. If it is larger, the alarm<br />

goes <strong>of</strong>f.<br />

Post-condition: The appropriate action is taken based on the operating pressure. If<br />

there is a dangerous condition, the alarm goes <strong>of</strong>f, if not, then process goes on<br />

as normal.

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