Annex I - VERTIC

▼M2
2B005 (continued)
f. Cathodic arc deposition production equipment incorporating a
grid of electromagnets for steering control of the arc spot on
the cathode;
g. Ion plating production equipment capable of the in situ
measurement of either of the following:
1. Coating thickness on the substrate and rate control; or
2. Optical characteristics.
Note: 2B005 does not control chemical vapour deposition,
cathodic arc, sputter deposition, ion plating or ion implantation
equipment, specially designed for cutting or
machining tools.
2B006 Dimensional inspection or measuring systems, equipment and
‘electronic assemblies’, as follows:
a. Computer controlled or ‘numerically controlled’ Coordinate
Measuring Machines (CMM), having a three dimensional (volumetric)
maximum permissible error of length measurement
(E 0 , MPE) at any point within the operating range of the
machine (i.e. within the length of axes) equal to or less
(better) than (1,7 + L/1 000) μm (L is the measured length in
mm), according to ISO 10360-2 (2009);
Technical Note:
The E 0, MPE of the most accurate configuration of the CMM
specified by the manufacturer (e.g. best of the following: probe,
stylus length, motion parameters, environment) and with ‘all
compensations available’ shall be compared to the
1,7 + L/1 000 μm threshold.
NB: SEE ALSO 2B206.
b. Linear and angular displacement measuring instruments, as
follows:
1. ‘Linear displacement’ measuring instruments having any of
the following:
Technical Note:
For the purpose of 2B006.b.1. ‘linear displacement’ means
the change of distance between the measuring probe and
the measured object.
a. Non-contact type measuring systems with a ‘resolution’
equal to or less (better) than 0,2 μm within a measuring
range up to 0,2 mm;
b. Linear voltage differential transformer systems having
both of the following:
1. ‘Linearity’ equal to or less (better) than 0,1 % within
a measuring range up to 5 mm; and
2. Drift equal to or less (better) than 0,1 % per day at a
standard ambient test room temperature ± 1 K;
2009R0428 — EN — 15.06.2012 — 002.001 — 118