Annex I - VERTIC

▼M2
6A004 Optical equipment and components, as follows:
a. Optical mirrors (reflectors) as follows:
NB: For optical mirrors specially designed for lithography
equipment, see 3B001.
1. ‘Deformable mirrors’ having either continuous or multi-
element surfaces, and specially designed components
therefor, capable of dynamically repositioning portions of
the surface of the mirror at rates exceeding 100 Hz;
2. Lightweight monolithic mirrors having an average
‘equivalent density’ of less than 30 kg/m 2 and a total
mass exceeding 10 kg;
3. Lightweight ‘composite’ or foam mirror structures having an
average ‘equivalent density’ of less than 30 kg/m 2 and a
total mass exceeding 2 kg;
4. Beam steering mirrors more than 100 mm in diameter or
length of major axis, which maintain a flatness of λ/2 or
better (λ is equal to 633 nm) having a control bandwidth
exceeding 100 Hz;
b. Optical components made from zinc selenide (ZnSe) or zinc
sulphide (ZnS) with transmission in the wavelength range
exceeding 3 000 nm but not exceeding 25 000 nm and
having any of the following:
1. Exceeding 100 cm 3 in volume; or
2. Exceeding 80 mm in diameter or length of major axis and
20 mm in thickness (depth);
c. ‘Space-qualified’ components for optical systems, as follows:
1. Components lightweighted to less than 20 % ‘equivalent
density’ compared with a solid blank of the same aperture
and thickness;
2. Raw substrates, processed substrates having surface coatings
(single-layer or multi-layer, metallic or dielectric,
conducting, semiconducting or insulating) or having
protective films;
3. Segments or assemblies of mirrors designed to be assembled
in space into an optical system with a collecting aperture
equivalent to or larger than a single optic 1 m in diameter;
4. Components manufactured from ‘composite’ materials
having a coefficient of linear thermal expansion equal to
or less than 5 × 10 –6 in any coordinate direction;
d. Optical control equipment as follows:
1. Equipment specially designed to maintain the surface figure
or orientation of the ‘space-qualified’ components specified
in 6A004.c.1. or 6A004.c.3.;
2. Equipment having steering, tracking, stabilisation or
resonator alignment bandwidths equal to or more than
100 Hz and an accuracy of 10 μrad (microradians) or less;
3. Gimbals having all of the following:
a. A maximum slew exceeding 5 °;
b. A bandwidth of 100 Hz or more;
2009R0428 — EN — 15.06.2012 — 002.001 — 226