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Field of view 500µm<br />

Copper plating on a patterned wafer<br />

3D presentation<br />

April 2004 Confidential / Proprietary<br />

1 Rev 3/24/00 SETUP AND OPERATING PROCEDURE FOR THE ...

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Field of view 500µm Copper plating on a patterned wafer 3D presentation April 2004 Confidential / Proprietary 12

Height difference between two areas of a copper plated patterned wafer A height difference between the two marked zones April 2004 Confidential / Proprietary 13

Page 1 and 2: Nano-Or’s 3DScope2000 Assorted me
Page 3 and 4: The 3DScope2000 System • High-acc
Page 5 and 6: Getting familiar with the operating
Page 7 and 8: Assorted measurements of various ap
Page 9 and 10: Field of view 1mm Mirror Array 3D p
Page 11: Field of view 250µm MEMS Cantileve
Page 15 and 16: Probes’ marks on pads A profile a
Page 17 and 18: Field of view 500µm Roll-off of a
Page 19 and 20: Field of view 100µm EPI Wafer Alig
Page 21 and 22: Field of view 50µm Metalization Ch
Page 23: Thank You Nano-Or Technologies 1 Yo

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