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The 3DScope2000 System<br />

• High-accuracy Z axis<br />

measurement – equivalent to<br />

phase shift interferometers<br />

+<br />

• No sensitivity to vibration<br />

• No scanning<br />

• No sensitivity to focus variations<br />

• Same foot print as microscope<br />

• Fast set-up – fast measurement<br />

• Short operation learning curve<br />

• High-End White light microscope<br />

• Multiple objectives<br />

• Bright and dark field<br />

• Optical quality eye piece<br />

• Colored CCD<br />

• Filters, polarizers<br />

• Optional motorized capabilities<br />

Stage<br />

Auto-focus<br />

Turret<br />

• Automated sample handling<br />

• Unified system<br />

• Automation<br />

• Production floor compliance<br />

• Integration with peripheral test<br />

and measurement equipment<br />

April 2004 Confidential / Proprietary<br />

3

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