Nano-Or Presentation

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Accept The height map is actually a matrix where every pixel represents an element on the sample. The color represents the height, according to the upper color bar. These are the analysis tools. One can choose a tool and analyze the data Software leveling Pressing the “profile” button” allows the operator to draw a line by marking two points and get the profile along the line. The numbers beside the color bar define the height range (upper and lower limits) of the sample measured in nanometer. 3D presentation by selecting an area in the height map While the upper color bar is fixed and represent the entire height of the measurement, the lower one can be either shrunk or slid so that the height map colors span between the numbers displayed at the ends of that bar. This is a zoom in the Z axis where one can see more details in the Z axis. Height difference between two areas Surface analysis April 2004 Confidential / Proprietary 6
Assorted measurements of various applications April 2004 Confidential / Proprietary 7
Page 1 and 2: Nano-Or’s 3DScope2000 Assorted me
Page 3 and 4: The 3DScope2000 System • High-acc
Page 5: Getting familiar with the operating
Page 9 and 10: Field of view 1mm Mirror Array 3D p
Page 11 and 12: Field of view 250µm MEMS Cantileve
Page 13 and 14: Height difference between two areas
Page 15 and 16: Probes’ marks on pads A profile a
Page 17 and 18: Field of view 500µm Roll-off of a
Page 19 and 20: Field of view 100µm EPI Wafer Alig
Page 21 and 22: Field of view 50µm Metalization Ch
Page 23: Thank You Nano-Or Technologies 1 Yo

Nano-Or Presentation

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