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Edwards, nEXT Turbomolecular Pumps, nEXT240, nEXT300 and ...

Edwards, nEXT Turbomolecular Pumps, nEXT240, nEXT300 and ...

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B800-00-880 Issue B<br />

3.3.1 Inlet-screen (supplied fitted on CF only)<br />

WARNING<br />

Removal of the inlet-screen will expose the risk of injury from sharp edges.<br />

Do not remove the inlet-screen unless you can be sure that there is no danger that debris can fall into the pump. If<br />

the inlet-screen is removed, the pumping speed will increase by up to 10% for course <strong>and</strong> 20% for fine inlet screens.<br />

Do not remove the inlet-screen until you are ready to mount the pump onto your system, since the screen protects<br />

the pump from contamination.<br />

Installation<br />

To remove the inlet-screen from a pump with CF inlet-flange, use a bent wire hook or small screwdriver to carefully<br />

lever the inlet-screen out from the inlet-flange.<br />

To replace an inlet-screen, locate it as centrally as possible over the CF inlet-flange <strong>and</strong> then, with your fingers<br />

spread evenly around the edge of the screen, push it firmly downwards. If they are not already in place, the tangs<br />

must be snapped into the locating groove in the inlet-flange using a suitable tool to press them into position. For ISO<br />

flanged pumps, <strong>Edwards</strong> supply a combined inlet screen / trapped O-ring.<br />

3.3.2 Mechanical fixing<br />

WARNING<br />

Do not operate the pump until it is securely fixed. If the pump seizes, the stored energy of the<br />

rotor can cause rapid movement of the pump, which may cause further damage <strong>and</strong> injury to<br />

people.<br />

WARNING<br />

The inlet screen is a coarse filter for debris <strong>and</strong> should not be used as a finger guard.<br />

There are two ways in which the <strong>nEXT</strong> pumps can be securely fixed. The ideal fixing for a <strong>nEXT</strong> pump is via its inlet<br />

flange to a rigid, firmly fixed vacuum system - refer to Section 3.3.3. If this is not possible because of the nature of<br />

the vacuum system then the base of the pump must be fixed to a firm support, refer to Section 3.3.4 for instructions<br />

on base mounting the pump.<br />

3.3.3 Inlet-connection <strong>and</strong> orientation<br />

WARNING<br />

Position system viewports <strong>and</strong> vulnerable components away from the pump inlet to safeguard<br />

against damage from possible ejected parts in the unlikely event of a pump rotar failure.<br />

The pump can be securely fixed to the vacuum system via the inlet-flange. The pump can be mounted in any attitude<br />

from the vertical <strong>and</strong> upright through to horizontal (±2°). If the pump is mounted horizontally, <strong>and</strong> you are using a<br />

rotary vane pump to back your <strong>nEXT</strong> pump then the backing port must point vertically downwards (±20°) to reduce<br />

the risk of contamination from the backing pump oil.<br />

Make sure that the pump-inlet <strong>and</strong> all components fitted to the pump-inlet are clean <strong>and</strong> dust-free. If the pump-inlet<br />

is not kept clean, the pump-down time may be increased.<br />

The inlet connections for the <strong>nEXT</strong> pump are CF flange <strong>and</strong> the ISO flange:<br />

• If the pump has a CF flange, use the copper compression gasket supplied with the pump <strong>and</strong> use a full<br />

complement of bolts to connect the inlet-flange of the pump to the vacuum system.<br />

© <strong>Edwards</strong> Limited 2009. All rights reserved. Page 27<br />

<strong>Edwards</strong> <strong>and</strong> the <strong>Edwards</strong> logo are trademarks of <strong>Edwards</strong> Limited.

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