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Edwards, nEXT Turbomolecular Pumps, nEXT240, nEXT300 and ...

Edwards, nEXT Turbomolecular Pumps, nEXT240, nEXT300 and ...

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B800-00-880 Issue B<br />

1 Introduction<br />

1.1 Scope <strong>and</strong> definitions<br />

This manual provides installation, operation, maintenance <strong>and</strong> storage instructions for the <strong>Edwards</strong> <strong>nEXT</strong><br />

<strong>Turbomolecular</strong> <strong>Pumps</strong>. You must use the <strong>nEXT</strong> pumps as specified in this manual. If you do not, the protection<br />

provided by the <strong>nEXT</strong> pumps may be impaired.<br />

Read this manual before you install <strong>and</strong> operate the <strong>nEXT</strong> pump. Important safety information is highlighted as<br />

WARNING <strong>and</strong> CAUTION instructions; you must obey these instructions. The use of WARNINGS <strong>and</strong> CAUTIONS is defined<br />

below.<br />

Introduction<br />

WARNING<br />

Warnings are given where failure to observe the instruction could result in injury or death to<br />

people.<br />

CAUTION<br />

Cautions are given where failure to observe the instruction could result in damage to the equipment, associated<br />

equipment <strong>and</strong> process<br />

The units used throughout this manual conform to the SI international system of units of measurement; where<br />

appropriate US equivalent units of measurement are also given. When flow rates are specified, the abbreviation<br />

‘sccm’ is used to mean st<strong>and</strong>ard cubic centimetres per minute. This is a flow of 1 cm 3 min -1 at an ambient temperature<br />

of 0 ºC <strong>and</strong> a pressure of 1013 mbar (1.013 x 10 5 Pa).<br />

In accordance with st<strong>and</strong>ard EN61010, the following warning label appears on the <strong>nEXT</strong> pump:<br />

Warning - refer to accompanying documentation.<br />

© <strong>Edwards</strong> Limited 2009. All rights reserved. Page 1<br />

<strong>Edwards</strong> <strong>and</strong> the <strong>Edwards</strong> logo are trademarks of <strong>Edwards</strong> Limited.

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