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EDAX EDS Manual

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<strong>EDAX</strong> Detector Geometry<br />

The elevation angle (EA) is the angle<br />

between the horizontal and the detector<br />

normal. The intersection distance (ID) is the<br />

distance in mm between the pole piece<br />

where the electron beam intersects the<br />

detector normal. The azimuth angle can not<br />

be shown in a cross-sectional view as<br />

shown at the left, but it is the angle as<br />

viewed from above between the detector<br />

normal and normal to the tilt axis. The<br />

working distance (WD) is where the sample<br />

is in mm below the pole piece. The take-off<br />

angle (TOA) is the angle between the x-ray trajectory and the sample surface. If the sample is<br />

placed at the intersection distance and not tilted, the take-off angle will equal the elevation angle.<br />

If the working distance is shorter than<br />

the intersection distance, the take-off<br />

angle will be less than the elevation<br />

angle. This assumes that the sample is<br />

smooth and not tilted.<br />

If the working distance is longer than<br />

the intersection distance, the take-off<br />

angle will be more than the elevation<br />

angle. Again, this assumes that the<br />

sample is smooth and not tilted.<br />

If the sample is tilted toward the detector,<br />

the take-off angle will be greater<br />

than the elevation angle. If the sample<br />

were tilted away from the detector, the<br />

take-off angle would be less than the<br />

elevation angle. Note that the azimuth<br />

angle must be taken into account to<br />

determine the take-off angle.<br />

<strong>EDAX</strong> Phoenix Training Course - <strong>EDAX</strong> Detector Geometry - page 1

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