Q150T S/E/ES Sample Preparation System Instruction Manual

Name Default
Q150T Sample Preparation System
Table 25 Metal Evaporation profile parameters
Value
Minimum
Value
Maximum
Value
Comment
Material Carbon Material to be evaporated in this
process
Evaporation
Current (A)
Evaporation time
(Minutes)
Out Gas Time
(Seconds)
Out Gas Current
(A)
Max Out Gas
Current
(A)
Max Out Gas
Voltage
(V)
0 0 50 Current applied during the
evaporation pulse
1 0.1 4 Duration of evaporation pulse
10 2 60 Time source is outgassed
before evaporation pulse.
20 0 40 Current applied tosource at the
start of outgas step.
Thus allowing automated out
outgassing.
Note the current during the out
gas may be adjusted.
40 0 50 Maximum current that can be
set during outgas
10 0 20 The voltage across the rod is
limited to this value during
Outgas
Outgas source Yes No Yes Include or exclude outgassing
step
Tooling Factor 5 0.1 10 Tooling factor for this process
Pump hold No No Yes If Yes, Q150T pumps down to
outgas-ready state and waits for
user input.
Note: If hold time (set in
System | Vacuum | Pump hold
time – see page 41) is
exceeded, Q150T vents
chamber.
Flush chamber No No Yes Set to Yes to flush chamber
with nitrogen before pumping
down.
Q150T - Instruction Manual 75 10473 - Issue 3