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Q150T S/E/ES Sample Preparation System Instruction Manual

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Deposition Rate (nm/min)<br />

2 0 0 . 0<br />

1 8 0 . 0<br />

1 6 0 . 0<br />

1 4 0 . 0<br />

1 2 0 . 0<br />

1 0 0 . 0<br />

8 0 . 0<br />

6 0 . 0<br />

4 0 . 0<br />

2 0 . 0<br />

0 . 0<br />

<strong>Q150T</strong> <strong>Sample</strong> <strong>Preparation</strong> <strong>System</strong><br />

2 0 3 0 4 0 5 0 6 0 7 0 8 0 9 0 1 0 0 1 1 0 1 2 0 1 3 0 1 4 0 1 5 0<br />

Deposition Current (mA)<br />

7 * 1 0 - 3<br />

1 * 1 0 - 2<br />

Figure 9-3. Sputtering Deposition Rate using Silver<br />

Silver tooling factor = 2.5<br />

10473 - Issue 3 80 <strong>Q150T</strong> - <strong>Instruction</strong> <strong>Manual</strong>

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