EXAMPLE 17: Full.Coupled Diffusion 312 SUPREM-IV.GS – 2D ...

EXAMPLE 9: Stress Dependent Oxidation
Newton loop 2 cut 1 upd 0.1005 orhs 0.02204
rhs 0.02313
&...
Newton loop28 cut 0.5 upd 0.00263 orhs 0.0005139
rhs 0.0002645
Newton loop30 cut 1 upd 0.0009523 orhs 0.0002647
rhs 1e-38
Continuation step #0 to lambda = 0.5 step 0.125
Newton loop 0 cut 1 upd 0.01423 orhs 0.01075
rhs 0.008121
Newton loop 2 cut 1 upd 0.002104 orhs 0.008299
rhs 0.003507
Newton loop 4 cut 1 upd 0.002404 orhs 0.003543
rhs 0.007114
Newton loop 4 cut 0.25 upd 0.002404 orhs 0.003543
rhs 0.002892
Newton loop 6 cut 0.25 upd 0.0007027 orhs 0.002888
rhs 1e-38
Continuation step #0 to lambda = 1 step 0.5
Newton loop 0 cut 1 upd 0.0005178 orhs 0.002156
rhs 1e-38
The nonlinear solver works by proceeding first from the linear solution.
The linear solution takes exactly two Newton steps. The first has a large
update step 0.9914, which reduces the error from 3.811 to 3.5e-15. The
second Newton step 1.3e-12 then of course is trivial since the solution has
been reached. The Newton loop counter is incremented by two whenever a
new Jacobian is factorized, and by one when only the error is recalculated.
The stress-dependent viscosity is turned on (continuation step 0 to lambda
= 0.25). The first step is moderately large 0.008394 and causes the error to
increase 0.00022 to 0.0003045. A quarter-step (cut 0.25) in that direction
is tried, which is found to decrease the error from 0.00022 to 0.0001. This
new position is accepted as worthwhile, and a second Newton step is taken
from there. It is found to decrease the error from 0.0059 to 0.00012. Since
this is successful, the cutback factor is increased back to 0.5.
SUPREM-IV.GS – 2D Process Simulation for Si and GaAs 283