EXAMPLE 17: Full.Coupled Diffusion 312 SUPREM-IV.GS – 2D ...

EXAMPLE 6: One Dimensional Oxide Growth
EXAMPLE 6 One Dimensional Oxide Growth
DESCRIPTION
This example compares the oxide thickness grown for different orienta-
tions. The input file for the simulation is in the “examples/exam6” directo-
ry, in the file “oxcalib.s4”.
#---some set stuff
option quiet
unset echo
foreach O (100 110 111)
echo "---------- Orientation < O > ------------------
--"
#---the minimal mesh
line x loc = 0.0 tag = left
line x loc = 1.0 tag = right
line y loc = 0.0 tag = top
line y loc = 1.0 tag=bottom
region silicon xlo = left xhi = right ylo = top yhi =
bottom
bound exposed xlo = left xhi = right ylo = top yhi =
top
init ori=O
#---the oxidation step
meth grid.ox=0.03
diffuse time=30 temp=900 wet
select z=y*1e8 label="Depth(A)"; print.1d x.v=0
form=8.0f
end
The first two lines keep the program as quiet as possible. The minimum
output is printed, and the input is not echoed at all.
SUPREM-IV.GS – 2D Process Simulation for Si and GaAs 267