EXAMPLE 17: Full.Coupled Diffusion 312 SUPREM-IV.GS – 2D ...

EXAMPLE 7: Fully Recessed Oxide Growth
ing the picture. A series of outlines is generated, one from each time step,
illustrating the evolution of the oxide profile (Figure 2). The first plot.2d
bound defined a plotting window large enough so that the subsequent plots
without axes would fit inside it.
FIGURE 2 Evolution of bird’s head profile.
plot.2d bound flow vleng=0.1
The flow pattern at the last time step can be plotted with the statement
above. The parameter vleng is the length to draw the longest velocity vec-
tor. The other vectors are scaled proportionally. This results in Figure 3.
The flow is normal at the interface but becomes more vertically oriented
away from it.
SUPREM-IV.GS – 2D Process Simulation for Si and GaAs 275