1 DENTON DISCOVERY 550 REACTED SPUTTERED ...

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5.4 Sputterer Venting 5.4.0 Click the RECIPE icon on the OVERVIEW screen. 5.4.1 Click the EDIT/CREATE under MASTER RECIPE box 5.4.2 Open SEQUENCE TYPE by clicking on the Auto Pump line 5.4.3 Choose the AUTOVENT by clicking on it 5.4.4 Click ADD to add the Main Vent sequence to Master Sequence List. 5.4.5 Save the recipe as A_Vent by clicking on the DOWNLOAD icon then save it by the name A_VENT in MASTER_RECIPE file. 5.4.6 Close the Master Recipe Builder window. 5.4.7 Click OVERVIEW icon to access the <strong>DENTON</strong>2 Main Control Screen. 5.4.8 Verify the A_Vent.dat appears in Recipe Name box 5.4.9 Click Start to activate the vent recipe. The high vacuum valve would close then the chamber vent valve opens. The vented chamber would be notified by a string of beeps sound and the “ Auto Process End OK” flashing alarm NOTE: At this point you must be wearing clean gloves and a face mask. 5.5 Substrate Loading 5.5.1 Load sample onto the substrate table, the deposition side face up 5.5.2 Remove the substrate table from the heater carrier if needed then replace it back into the chamber after sample loading. 5.6 Closing Chamber Door 6.0 PROCEDURE 5.6.1 Check the chamber o-ring for debris/particles. If needed, wipe the circumference of the o-ring with isopropyl alcohol and cleanroom wipers 5.6.2 Close the chamber door with the lock 6.1 Create the recipe 4
6.1.1 Create the recipe by clicking on RECIPE icon to open RECIPE SCREEN 6.1.2 Click the EDIT/CREATE in AUTOMATIC SEQUENCE CONFIGURATION box 6.1.3 Click OPEN to access the recipe list in Deposition file 6.1.4 Pick the designated recipe by double clicking on its name 6.1.5 Change the parameters such as time/substrate temperature in deposition step then save the change by clicking SAVE. 6.1.6 Click Close to close the Recipe 6.2 Create the sequence. The sequence should contain three steps: AUTO PUMP, AUTO DEPOSITIION, and AUTO VENT. Each step will be added to the sequence one by one. 6.2.1 Click the EDIT/CREAT under MASTER RECIPE box. 6.2.2 Click on AUTO PUMP under SEQUENCE TYPE to pull down the list of action 6.2.3 High light Auto Pump under Sequence Type. 6.2.4 Add APump.dat to the Master Sequence List by clicking on ADD icon 6.2.5 Pull down the Sequence Type then high light Auto Deposition 6.2.6 Pull down the list of deposition recipe by click on any recipe name under USER DEFINE SEQUENCE 6.2.7 Add the designed recipe to the Master Sequence List by click on ADD icon after high lighting recipe name. 6.2.8 Add Auto Vent sequence to the recipe by open Sequence Type, choose Auto Vent then add it to Master Sequence List as MainVent. 6.2.9 Click DOWNLOAD to load the created recipe 6.2.10 Save the recipe by an appropriate name to the Master Recipe. 6.2.11 Exit the recipe by click on close. 6.2.12 Verify the Sequence Appearance in the Active Recipe box on Recipe Screen 5
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Page 3: 4.2.5 The vacuum chamber should not

1 DENTON DISCOVERY 550 REACTED SPUTTERED ...

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