1 DENTON DISCOVERY 550 REACTED SPUTTERED ...

6.2.13 Go to Over view
6.2.14 Click Start to start the process.
The system is going to pump down the chamber, deposit the requested film than vent the
chamber automatically
Warning: Do not use Auto Regen in any case
6.3 Deposition Completion
The process completion will be notified by a string of beeping sound and
the “Auto Process End OK” flashing alarm. It is safe to open the chamber
door and remove the sample.
6.4 Chamber Pump down
6.4.1 Close and lock the chamber door with the hook
6.4.2 Click the RECIPE icon to open RECIPE SCREEN
6.4.3 Click EDIT/ CREATE under MASTER RECIPE to open Master
Recipe Builder window
6.4.4 Click Auto Pump under Sequence Type to pull down the list of
sequence
6.4.5 Click the Auto Pump to high light it
6.4.6 Add APump.dat to the Master Sequence List by click on ADD icon
6.4.7 Load the Auto Pump sequence to Master Recipe by clicking on
DOWNLOAD then save the recipe by the name A_Pump1
6.4.8 Close the Master Recipe Builder window by clicking CLOSE
6.4.9 Click the OVERVIEW icon to enter the main controller window.
6.4.10 Start to pumping down the chamber by clicking the START
6.4.11 Complete filling in the log book. Enter any thickness data if
available. Note any problems under comments.
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