Wyko NT3300 Optical 3D Profiling System - Login | Nanolab, UCLA
Wyko NT3300 Optical 3D Profiling System - Login | Nanolab, UCLA
Wyko NT3300 Optical 3D Profiling System - Login | Nanolab, UCLA
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VSI Measurements (160nm < Step height)<br />
Vertical Scanning Interferometry (VSI) uses the interference of light to map the surface<br />
of your sample. VSI is used for relatively rough surfaces (Ra greater than 0.1 µm) or<br />
surfaces with discontinuities or steps greater than 160 nm (λ/4). In VSI mode, the optics<br />
physically scan through the focus of the objective while obtaining “snapshots”, called<br />
frames, from the camera inside the Integrated Optics Assembly (IOA). These frames are<br />
used to reconstruct a map of the surfaces of the sample.<br />
PSI Measurements (Step height < 160nm)<br />
Phase Shifting Interferometry (PSI) uses the interference of light to produce information<br />
on the surface of a sample. PSI is used for extremely smooth samples like mirrors or<br />
optics. In PSI mode, a piezoelectric transducer (PZT) within the IOA head precisely<br />
shifts the interference pattern six times; each shift is captured to produce one frame of<br />
data. These frames are then reconstructed to form a topographical map of the measured<br />
surface.<br />
II. Starting the <strong>Wyko</strong>:<br />
1. Check the logbook to verify that there are no documented problems with the <strong>Wyko</strong>.<br />
2. Make sure to sign the logbook BEFORE every use.<br />
3. If the instrument is already ON, you may only need to turn ON the CRT monitor.<br />
Otherwise, to turn ON the <strong>Wyko</strong>, gently pull the red emergency-power-down switch<br />
until it pops out, and then press the green lighted Start button. Next, turn on the CPU<br />
located behind the cabinet door and also turn ON the CRT screen.<br />
4. Start the Vision 3.43 software.<br />
5. If the <strong>Wyko</strong> has just been turned ON, it will need to be recalibrated with the<br />
appropriate calibration standard (Fig. 2).<br />
A B<br />
PSI calibration standard VSI calibration standard<br />
Fig 2. Calibration Standards