Wyko NT3300 Optical 3D Profiling System - Login | Nanolab, UCLA

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IV. Stitching Stitching is an option that will allow for you to measure samples that are larger than a single field of view. Several measurements are taken and “stitched” together to form one dataset. Stitching properties are found in the Stitching tab in the measurements options window. 1. To use stitching, select the Enable Stitching check box. 2. Select the desired Starting Options Use Current Location: Allows you to set the measurement location before each measurement. Use Fixed Location: Will take a measurement at the same location each time. (This location is set by clicking the Set Start button, then moving the stage to the desired start location and clicking OK once again. 3. Set the desired area to be measured using the Stitching Dimensions box. You may either enter the desired dimensions or you may train the Wyko by marking the measurement boundaries. 4. To verify your dimensions are correct, click Test. Click OK to continue through all four corners of your desired area to be measured. Click Finish when done. 5. You may have to re-enter or re-Teach the dimensions of your die, if any part of the measurement area was outside the corners of the test pattern. IV. Turning off the Wyko If you will not be using the Wyko within the next hour or the time is after 5pm, please shut down the machine as follows. 1. Close Wyko Vision 3.22. 2. Close windows XP by selecting Start>>Shutdown. 3. Turn off the monitors. 4. Turn off the power to the main system by pushing in the main power switch. IV. Measurements Tips 1. Check the limitations and resolution section of the reference page to determine which measurement is best for your sample. 2. Transparent materials (i.e. PDMS, PMMA, Parylene, etc.) must be placed on top of a reflective material (i.e. wafer, glass with metal, mirror, etc.) 3. The limitations for transparent materials, i.e. Silicon dioxide and Silicon Nitride, are a minimum of 2 µm for measuring the step height. Trouble Shooting 1. If the tilt head becomes stuck and will not tilt in any direction, the entire system must be reset, including the power reset switch located in the back of the machine.
Download Veeco Vision 3.43- www.nanolab.ucla.edu/downloads/vision.zip
Page 1 and 2: OPERATING INSTRUCTIONS FOR Wyko NT3
Page 3 and 4: VSI Measurements (160nm < Step heig
Page 5 and 6: 3. Select the INTENSITY box from th
Page 7: 3. Select the INTENSITY box from th

Wyko NT3300 Optical 3D Profiling System - Login | Nanolab, UCLA

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