Wyko NT3300 Optical 3D Profiling System - Login | Nanolab, UCLA
Wyko NT3300 Optical 3D Profiling System - Login | Nanolab, UCLA
Wyko NT3300 Optical 3D Profiling System - Login | Nanolab, UCLA
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3. Select the INTENSITY box from the Measurement Options window. Arrange both<br />
windows side by side.<br />
4. Select VSI from the measurement type box and set the following settings to your<br />
desired field of view. (The field of view for several optics combinations are in Table 1)<br />
Resolution =<br />
Objective =<br />
FOV =<br />
5. Using the Intensity window, setup the hardware for coarse focusing by going under<br />
HARDWARE →FILTER → PSI LOW MAG.<br />
6. Focus on your sample by carefully lowering the objective. DO NOT allow the<br />
objective to contact any surface.<br />
7. Adjust the intensity as needed to avoid saturation using the slidebar. Once you find<br />
the best focus at the TOP of the feature/step, dark fringes should now be visible on<br />
this surface.<br />
8. Hold down the “Tilt” button and use the “Tilt and Tip” knobs to orient 3-4 fringes<br />
perpendicular to the step.<br />
9. Now setup the hardware for the final focusing by going under<br />
HARDWARE →FILTER → VSI, then readjust your final focus and intensity.<br />
10. After you have found the best focus and intensity, click on the VSI Options tab in<br />
order to adjust additional parameters such as the following:<br />
Speed of Measurement =<br />
Back scan =<br />
Length of Scan =<br />
Modulation Threshold =<br />
11. After setting all options, select OK from the Measurement Options window.<br />
12. Close the intensity window.<br />
13. To measure your sample, Select NEW.
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